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Marvin D. Rausch grad student 1985 U Mass Amherst
 (Cationic and condensation polymerization of organometallic monomers)
George M. Whitesides research scientist 1997 Harvard
 (Visiting Scholar)
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Publications

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Satyanarayana VS, Kessler F, Singh V, et al. (2014) Radiation-sensitive novel polymeric resist materials: iterative synthesis and their EUV fragmentation studies. Acs Applied Materials & Interfaces. 6: 4223-32
Satyanarayana VSV, Singh V, Kalyani V, et al. (2014) A hybrid polymeric material bearing a ferrocene-based pendant organometallic functionality: Synthesis and applications in nanopatterning using EUV lithography Rsc Advances. 4: 59817-59820
Gonsalves KE, Wang M, Lee CT, et al. (2009) Novel chemically amplified resists incorporating anionic photoacid generator functional groups for sub-50-nm half-pitch lithography Journal of Materials Chemistry. 19: 2797-2802
Wang M, Lee CT, Henderson CL, et al. (2008) Fullerene grafted photoacid generator(PAG) bound polymer resists Journal of Photopolymer Science and Technology. 21: 747-751
Gonsalves KE, Wang M, Pujari NS. (2008) High refractive-index resists composed of anionic photoacid generator (PAG) bound polymers for 193 nm immersion lithography Proceedings of Spie - the International Society For Optical Engineering. 6923
Wang M, Lee CT, Henderson CL, et al. (2008) Synthesis and properties of new anionic photoacid generators bound polymer resists for e-beam and EUV lithography Proceedings of Spie - the International Society For Optical Engineering. 6923
Wang M, Lee CT, Henderson CL, et al. (2008) Incorporation of ionic photoacid generator (PAG) and base quencher into the resist polymer main chain for sub-50 nm resolution patterning Journal of Materials Chemistry. 18: 2704-2708
Lee CT, Henderson CL, Wang M, et al. (2008) The effect of direct PAG incorporation into the polymer main chain on reactive ion etch resistance of 193 nm and EUV chemically amplified resists Microelectronic Engineering. 85: 963-965
Wang M, Yueh W, Gonsalves KE. (2008) Fluorine-contained photoacid generators (PAGs) and corresponding polymer resists Journal of Fluorine Chemistry. 129: 607-612
Wang M, Tang M, Her TH, et al. (2007) Synthesis, characterization and lithography performance of novel anionic photoacid generator (PAG) bound polymers Journal of Photopolymer Science and Technology. 20: 793-797
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