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Mehmet Ozgur, D.Sc.

Affiliations: 
2000 The George Washington University, Washington, DC, United States 
Area:
Electronics and Electrical Engineering, Mechanical Engineering, Chemical Engineering
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"Mehmet Ozgur"
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Mona E. Zaghloul grad student 2000 The George Washington University
 (CMOS -based monolithic MEMS technology and its applications in microwave systems.)

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Publications

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Ozgur M, Pedersen M, Huff M. (2018) Comparison of the Etch Mask Selectivity of Nickel and Copper for a Deep, Anisotropic Plasma Etching Process of Silicon Carbide (SiC) Ecs Journal of Solid State Science and Technology. 7
Ozgur M, Huff M. (2017) High-etch rate processes for performing deep, highly anisotropic etches in silicon carbide using inductively coupled plasma etching Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 35: 42003
Ozgur M, Huff M. (2017) Plasma Etching of Deep High-Aspect Ratio Features Into Silicon Carbide Ieee\/Asme Journal of Microelectromechanical Systems. 26: 456-463
Ozgur M, Zaghloul ME. (2001) RF components for wireless communication using CM-CMOS technology International Journal of Rf and Microwave Computer-Aided Engineering. 11: 330-340
Ozgur M, Zaghloul ME. (2001) RF MEMS components using CMOS technology Ieee Antennas and Propagation Society, Ap-S International Symposium (Digest). 3: 678-681
Ozgur M, Zaghloul ME, Gaitan M. (2000) Micromachined 28-GHz power divider in CMOS technology Ieee Microwave and Wireless Components Letters. 10: 99-101
Ozgur M, Milanovic V, Zincke C, et al. (2000) Quasi-tem characteristic impedance of micromachined cmos coplanar waveguides Ieee Transactions On Microwave Theory and Techniques. 48: 852-854
Milanovic V, Ozgur M, Degroot DC, et al. (1998) Characterization of broad-band transmission for coplanar waveguides on cmos silicon substrates Ieee Transactions On Microwave Theory and Techniques. 46: 632-640
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