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Juntao Li, Ph.D.

Affiliations: 
2010 Nanoscale Science and Engineering-Nanoscale Science State University of New York, Albany, Albany, NY, United States 
Area:
Materials Science Engineering, Nanoscience, Nanotechnology
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"Juntao Li"
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Bradley L. Thiel grad student 2010 SUNY Albany
 (Fabrication and characterization of nanomaterials grown by electron beam induced deposition process.)

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Publications

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Muthinti GR, Loubet N, Chao R, et al. (2017) Materials characterization for process integration of multi-channel gate all around (GAA) devices Proceedings of Spie. 10145
Li J, Bruley J, Conti R, et al. (2017) Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration Microscopy and Microanalysis. 23: 1462-1463
Jamison PC, Tsunoda T, Vo TA, et al. (2015) SiO₂ Free HfO₂ Gate Dielectrics by Physical Vapor Deposition Ieee Transactions On Electron Devices
Li J, Cheng K, Khakifirooz A, et al. (2014) Strain quantification analysis of epitaxial SiGe on SOI by nanobeam diffraction (NBD) Microscopy and Microanalysis. 20: 1070-1071
Li J, Toth M, Dunn KA, et al. (2010) Interfacial mixing and internal structure of Pt-containing nanocomposites grown by room temperature electron beam induced deposition Journal of Applied Physics. 107
Botman A, Hagen CW, Li J, et al. (2009) Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt (P F3)4 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27: 2759-2763
Brainard R, Hassanein E, Li J, et al. (2008) Photons, electrons, and acid yields in EUV photoresists: A progress report Proceedings of Spie - the International Society For Optical Engineering. 6923
Li J, Toth M, Tileli V, et al. (2008) Evolution of the nanostructure of deposits grown by electron beam induced deposition Applied Physics Letters. 93
Li J, Bresin M, Dunn K, et al. (2007) Determination of Impurity Carbon sp2/sp3 Bond Ratio in Electron Beam Deposited Tungsten Nanostructures using Electron Energy Loss Spectroscopy Microscopy and Microanalysis. 13: 1472-1473
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