Rashi Garg, Ph.D.
Affiliations: | 2008 | State University of New York, Albany, Albany, NY, United States |
Area:
Materials Science Engineering, Optics PhysicsGoogle:
"Rashi Garg"Parents
Sign in to add mentor| Gregory Denbeaux | grad student | 2008 | SUNY Albany | |
| (Extreme ultraviolet resist outgassing and its effect on nearby optics.) | ||||
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Publications
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| Khopkar Y, Thomas P, Yankulin L, et al. (2011) Dependence of contamination rates on key parameters in EUV optics Proceedings of Spie - the International Society For Optical Engineering. 7969 |
| Garg R, Faradzhev N, Hill S, et al. (2010) A simple null-field ellipsometric imaging system (NEIS) for in-situ monitoring of EUV-induced deposition on EUV optics Proceedings of Spie - the International Society For Optical Engineering. 7636 |
| Thomas P, Yankulin L, Khopkar Y, et al. (2010) Wavelength dependence of carbon contamination on mirrors with different capping layers Proceedings of Spie - the International Society For Optical Engineering. 7636 |
| Fan YJ, Yankulin L, Thomas P, et al. (2010) Carbon contamination topography analysis of EUV masks Proceedings of Spie - the International Society For Optical Engineering. 7636 |
| Fan YJ, Yankulin L, Antohe A, et al. (2010) Effect of carbon contamination on the printing performance of extreme ultraviolet masks Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28: 321-328 |
| Antohe AO, Mbanaso C, Fan YJ, et al. (2009) EUV resist outgassing - Scaling to HVM intensity Proceedings of Spie - the International Society For Optical Engineering. 7271 |
| Fan YJ, Yankulin L, Antohe A, et al. (2009) Carbon contamination of extreme ultraviolet (EUV) masks and its effect on imaging Proceedings of Spie - the International Society For Optical Engineering. 7271 |
| Jindal V, Garg R, Denbeaux G, et al. (2009) Assumptions and trade-offs of extreme ultraviolet optics contamination modeling Proceedings of Spie - the International Society For Optical Engineering. 7271 |
| Garg R, Naulleau P, Brainard R, et al. (2008) Proximity printing using extreme ultraviolet radiation Proceedings of Spie - the International Society For Optical Engineering. 6921 |
| Garg R, Wüest A, Gullikson E, et al. (2008) EUV optics contamination studies in presence of selected hydrocarbons Proceedings of Spie - the International Society For Optical Engineering. 6921 |