Year |
Citation |
Score |
2011 |
Dulkin A, Ko E, Wu L, Karim I, Leeser K, Park KJ, Meng L, Ruzic DN. Improving the quality of barrier/seed interface by optimizing physical vapor deposition of Cu Film in hollow cathode magnetron Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 29. DOI: 10.1116/1.3602079 |
0.432 |
|
2010 |
Wu L, Ko E, Dulkin A, Park KJ, Fields S, Leeser K, Meng L, Ruzic DN. Flux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper. The Review of Scientific Instruments. 81: 123502. PMID 21198018 DOI: 10.1063/1.3504371 |
0.458 |
|
2006 |
Ko E, Hershkowitz N. Asymmetry reversal of ion collection by mach probes in flowing unmagnetized plasmas Plasma Physics and Controlled Fusion. 48: 621-634. DOI: 10.1088/0741-3335/48/5/009 |
0.614 |
|
2006 |
Severn GD, Wang X, Ko E, Hershkowitz N, Turner MM, McWilliams R. Ion flow and sheath physics studies in multiple ion species plasmas using diode laser based laser-induced fluorescence Thin Solid Films. 506: 674-678. DOI: 10.1016/J.Tsf.2005.08.114 |
0.685 |
|
2004 |
Wang X, Ko E, Hershkowitz N. The study of presheath instabilities in two ion species plasmas Ieee International Conference On Plasma Science. 224. |
0.657 |
|
2004 |
Ko E, Wang X, Hershkowitz N. The measurement of ion flow velocity by mach probes in unmagnetized plasmas Ieee International Conference On Plasma Science. 396. |
0.61 |
|
2004 |
Hershkowitz N, Ko E, Wang X. Presheath environment in weakly ionized multi-species plasmas Ieee International Conference On Plasma Science. 366. |
0.535 |
|
2003 |
Severn GD, Wang X, Ko E, Hershkowitz N. Experimental studies of the Bohm criterion in a two-ion-species plasma using laser-induced fluorescence. Physical Review Letters. 90: 145001. PMID 12731924 DOI: 10.1103/Physrevlett.90.145001 |
0.502 |
|
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