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Sairam Agraharam, Ph.D. - Publications

Affiliations: 
2000 Georgia Institute of Technology, Atlanta, GA 
Area:
Chemical Engineering, Electronics and Electrical Engineering
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5 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2002 Tanikella RV, Agraharam S, Allen SAB, Hess DW, Kohl PA. Moisture absorption studies of fluorocarbon films deposited from pentafluoroethane and octafluorocyclobutane plasmas Journal of Electronic Materials. 31: 1096-1103. DOI: 10.1007/S11664-002-0048-0  0.504
2001 Agraharam S, Hess DW, Kohl PA, Allen SAB. Electrical Properties and Temperature-Humidity Studies of Fluorocarbon Films Deposited from Pentafluoroethane/Argon Plasmas Journal of the Electrochemical Society. 148. DOI: 10.1149/1.1366629  0.774
2001 Agraharam S, Hess DW, Kohl PA, Bidstrup Allen SA. Comparison of plasma chemistries and structure-property relationships of fluorocarbon films deposited from octafluorocyclobutane and pentafluoroethane monomers Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 439-446. DOI: 10.1116/1.1354980  0.775
2000 Agraharam S, Hess DW, Kohl PA, Bidstrup Allen SA. Thermal stability of fluorocarbon films deposited from pentafluoroethane/argon plasmas Journal of the Electrochemical Society. 147: 2665-2670. DOI: 10.1149/1.1393587  0.744
1999 Agraharam S, Hess DW, Kohl PA, Bidstrup Allen SA. Plasma chemistry in fluorocarbon film deposition from pentafluoroethane/argon mixtures Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 17: 3265-3271. DOI: 10.1116/1.582053  0.746
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