Lili Ji, Ph.D. - Publications
Affiliations: | 2007 | University of California, Berkeley, Berkeley, CA, United States |
Area:
Fluid and Plasma Physics, Electronics and Electrical Engineering, Materials Science EngineeringYear | Citation | Score | |||
---|---|---|---|---|---|
2008 | Ji Q, Chen Y, Ji L, Hahto S, Leung KN, Lee TG, Moon DW. Development of C(60) plasma ion source for time-of-flight secondary ion mass spectrometry applications. The Review of Scientific Instruments. 79: 02B309. PMID 18315175 DOI: 10.1063/1.2804912 | 0.598 | |||
2006 | Ji Q, Chen Y, Ji L, Jiang X, Leung K. Ion beam imprinting system for nanofabrication Microelectronic Engineering. 83: 796-799. DOI: 10.1016/J.Mee.2006.01.094 | 0.591 | |||
2005 | Jiang X, Chen Y, Ji L, Ji Q, Leung K. Development of a 27.12 MHz radio frequency driven ion source with 3 mTorr operation pressure for neutron generators Review of Scientific Instruments. 76: 103302. DOI: 10.1063/1.2113782 | 0.571 | |||
2004 | Ji Q, Ji L, Chen Y, Leung K. Combined electron- and ion-beam imprinter and its applications Applied Physics Letters. 85: 4618-4620. DOI: 10.1063/1.1812367 | 0.597 | |||
2003 | Jiang X, Ji Q, Ji L, Chang A, Leung K. Resolution improvement for a maskless microion beam reduction lithography system Journal of Vacuum Science & Technology B. 21: 2724-2727. DOI: 10.1116/1.1622937 | 0.606 | |||
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