Byung-Chan Lee, Ph.D. - Publications
Affiliations: | 2000 | Rensselaer Polytechnic Institute, Troy, NY, United States |
Area:
Materials Science EngineeringYear | Citation | Score | |||
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2001 | Lee B, Duquette DJ, Gutmann RJ. Synthesis of Model Alumina Slurries for Damascene Patterning of Copper Mrs Proceedings. 671. DOI: 10.1557/Proc-671-M2.7 | 0.375 | |||
2000 | Bhusari DM, Wedlake MD, Kohl PA, Case C, Klemens FP, Miner J, Lee B, Gutmann RJ, Lee JJ, Shick R, Rhodes L. Fabrication of Air-Gaps Between Cu Interconnects for Low Intralevel k. Mrs Proceedings. 612. DOI: 10.1557/Proc-612-D4.8.1 | 0.388 | |||
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