Sean Xiaokang Shi - Publications
Affiliations: | 2009 | University of Texas at Austin, Austin, Texas, U.S.A. |
Year | Citation | Score | |||
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2007 | Yu P, Shi SX, Pan DZ. True process variation aware optical proximity correction with variational lithography modeling and model calibration Journal of Micro-Nanolithography Mems and Moems. 6: 31004. DOI: 10.1117/1.2752814 | 0.526 | |||
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