Year |
Citation |
Score |
2009 |
Lucovsky G, Long JP, Chung KB, Seo H. Atomically-engineered interfaces between crystalline-Ge substrates and i) Nanocrystalline HfO2 and ii) Non-Crystalline Hf Si oxynitride high-K dielectrics? E-Journal of Surface Science and Nanotechnology. 7: 381-388. DOI: 10.1380/Ejssnt.2009.381 |
0.567 |
|
2009 |
Seo H, Chung KB, Long JP, Lucovsky G. Preparation of native oxide and carbon-minimized ge surface by NH 4OH -based cleaning for high- k/Ge MOS gate stacks Journal of the Electrochemical Society. 156: H813-H817. DOI: 10.1149/1.3212848 |
0.441 |
|
2009 |
Lucovsky G, Long JP, Chung KB, Seo H, Watts B, Vasic R, Ulrich MD. Predeposition plasma nitridation process applied to Ge substrates to passivate interfaces between crystalline-Ge substrates and Hf-based high-K dielectrics Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27: 294-299. DOI: 10.1116/1.3072917 |
0.635 |
|
2009 |
Chung KB, Long JP, Seo H, Lucovsky G, Nordlund D. Thermal evolution and electrical correlation of defect states in Hf-based high- κ dielectrics on n -type Ge (100): Local atomic bonding symmetry Journal of Applied Physics. 106. DOI: 10.1063/1.3236679 |
0.42 |
|
2009 |
Lucovsky G, Lee S, Long JP, Seo H, Lüning J. Interfacial transition regions at germanium/Hf oxide based dielectric interfaces: Qualitative differences between non-crystalline Hf Si oxynitride and nanocrystalline HfO2 gate stacks Microelectronic Engineering. 86: 224-234. DOI: 10.1016/J.Mee.2008.05.023 |
0.615 |
|
2009 |
Lucovsky G, Seo H, Long JP, Chung KB, Vasic R, Ulrich M. Defect states in HfO2 on deposited on Ge(1 1 1) and Ge(1 0 0) substrates Applied Surface Science. 255: 6443-6450. DOI: 10.1016/J.Apsusc.2008.09.070 |
0.633 |
|
2008 |
Lucovsky G, Long JP, Seo H, Chung BK, Lee S. Elimination of native Ge dielectrics at Ge/High-k dielectric interfaces for Ge MOS devices Ecs Transactions. 16: 381-395. DOI: 10.1149/1.2986796 |
0.481 |
|
2008 |
Chung KB, Seo H, Long JP, Lucovsky G. Suppression of defect states in HfSiON gate dielectric films on n -type Ge(100) substrates Applied Physics Letters. 93. DOI: 10.1063/1.3005422 |
0.541 |
|
2008 |
Lee S, Long JP, Lucovsky G, Lüning J. Suppression of Ge-O and Ge-N bonding at Ge-HfO2 and Ge-TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates Thin Solid Films. 517: 155-158. DOI: 10.1016/J.Tsf.2008.08.099 |
0.546 |
|
2008 |
Lee S, Long JP, Lucovsky G, Whitten JL, Seo H, Lüning J. Suppression of Ge-O and Ge-N bonding at Ge-HfO2 and Ge-TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates: Integration issues Ge gate stacks into advanced devices Microelectronics Reliability. 48: 364-369. DOI: 10.1016/J.Microrel.2007.07.068 |
0.616 |
|
2008 |
Lucovsky G, Lee S, Long JP, Seo H, Lüning J. Elimination of GeO2 and Ge3N4 interfacial transition regions and defects at n-type Ge interfaces: A pathway for formation of n-MOS devices on Ge substrates Applied Surface Science. 254: 7933-7937. DOI: 10.1016/J.Apsusc.2008.03.157 |
0.617 |
|
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