Yoshie Kimura, Ph.D. - Publications
Affiliations: | 2005 | University of California, Berkeley, Berkeley, CA, United States |
Year | Citation | Score | |||
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2004 | Kimura Y, Coburn JW, Graves DB. Vacuum beam studies of fluorocarbon radicals and argon ions on Si and SiO 2 surfaces Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 22: 2508-2516. DOI: 10.1116/1.1810166 | 0.355 | |||
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