Year |
Citation |
Score |
2015 |
Ng E, Yang Y, Hong VA, Ahn CH, Heinz DB, Flader I, Chen Y, Everhart CLM, Kim B, Melamud R, Candler RN, Hopcroft MA, Salvia JC, Yoneoka S, Graham AB, ... Agarwal M, et al. The long path from MEMS resonators to timing products Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 1-2. DOI: 10.1109/MEMSYS.2015.7050869 |
0.788 |
|
2009 |
Chandorkar SA, Candler RN, Duwel A, Melamud R, Agarwal M, Goodson KE, Kenny TW. Multimode thermoelastic dissipation Journal of Applied Physics. 105. DOI: 10.1063/1.3072682 |
0.824 |
|
2009 |
Kim B, Candler RN, Melamud R, Hopcroft MA, Yoneoka S, Lee HK, Agarwal M, Chandorkar SA, Yama G, Kenny TW. Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems Journal of Applied Physics. 105. DOI: 10.1063/1.3054366 |
0.764 |
|
2008 |
Chandorkar SA, Agarwal M, Melamud R, Candler RN, Goodson KE, Kenny TW. Limits of quality factor in bulk-mode micromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 74-77. DOI: 10.1109/MEMSYS.2008.4443596 |
0.793 |
|
2008 |
Kim B, Hopcroft MA, Candler RN, Jha CM, Agarwal M, Melamud R, Chandorkar SA, Yama G, Kenny TW. Temperature dependence of quality factor in MEMS resonators Journal of Microelectromechanical Systems. 17: 755-766. DOI: 10.1109/Jmems.2008.924253 |
0.826 |
|
2008 |
Jha CM, Hopcroft MA, Chandorkar SA, Salvia JC, Agarwal M, Candler RN, Melamud R, Kim B, Kenny TW. Thermal isolation of encapsulated MEMS resonators Journal of Microelectromechanical Systems. 17: 175-184. DOI: 10.1109/Jmems.2007.904332 |
0.81 |
|
2008 |
Agarwal M, Chandorkar SA, Mehta H, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Bahl G, Yama G, Kenny TW, Murmann B. A study of electrostatic force nonlinearities in resonant microstructures Applied Physics Letters. 92. DOI: 10.1063/1.2834707 |
0.775 |
|
2007 |
Kim B, Hopcroft MA, Melamud R, Jha CM, Agarwal M, Chandorkar SA, Kenny TW. CMOS compatible wafer-scale encapsulation with MEMS resonators 2007 Proceedings of the Asme Interpack Conference, Ipack 2007. 1: 499-504. DOI: 10.1115/IPACK2007-33234 |
0.843 |
|
2007 |
Hopcroft MA, Lee HK, Kim B, Melamud R, Chandorkar S, Agarwal M, Jha CM, Salvia J, Bahl G, Mehta H, Kenny TW. A high-stability MEMS frequency reference Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 1307-1309. DOI: 10.1109/SENSOR.2007.4300378 |
0.786 |
|
2007 |
Kim B, Hopcroft M, Jha CM, Melamud R, Chandorkar S, Agarwal M, Chen KL, Park WT, Candler R, Yama G, Partridge A, Lutz M, Kenny TW. Using MEMS to build the device and the package Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 331-334. DOI: 10.1109/SENSOR.2007.4300135 |
0.752 |
|
2007 |
Jha CM, Bahl G, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Agarwal M, Salvia J, Mehta H, Kenny TW. CMOS-compatible dual-resonator mems temperature sensor with milli-degree accuracy Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 229-232. DOI: 10.1109/SENSOR.2007.4300111 |
0.812 |
|
2007 |
Agarwal M, Park KK, Candler RN, Kim B, Hopcroft MA, Chandorkar SA, Jha CM, Melamud R, Kenny TW, Murmann B. Nonlinear characterization of electrostatic MEMS resonators Proceedings of the Ieee International Frequency Control Symposium and Exposition. 209-212. DOI: 10.1109/FREQ.2006.275380 |
0.822 |
|
2007 |
Agarwal M, Mehta H, Candler RN, Chandorkar SA, Kim B, Hopcroft MA, Melamud R, Bahl G, Yama G, Kenny TW, Murmann B. Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators Journal of Applied Physics. 102. DOI: 10.1063/1.2785018 |
0.803 |
|
2007 |
Jha CM, Bahl G, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Agarwal M, Salvia J, Mehta H, Kenny TW. High resolution microresonator-based digital temperature sensor Applied Physics Letters. 91. DOI: 10.1063/1.2768629 |
0.828 |
|
2007 |
Hopcroft MA, Kim B, Chandorkar S, Melamud R, Agarwal M, Jha CM, Bahl G, Salvia J, Mehta H, Lee HK, Candler RN, Kenny TW. Using the temperature dependence of resonator quality factor as a thermometer Applied Physics Letters. 91. DOI: 10.1063/1.2753758 |
0.832 |
|
2007 |
Melamud R, Kim B, Chandorkar SA, Hopcroft MA, Agarwal M, Jha CM, Kenny TW. Temperature-compensated high-stability silicon resonators Applied Physics Letters. 90. DOI: 10.1063/1.2748092 |
0.844 |
|
2007 |
Agarwal M, Park KK, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Kenny TW, Murmann B. Acceleration sensitivity in beam-type electrostatic microresonators Applied Physics Letters. 90. DOI: 10.1063/1.2426884 |
0.811 |
|
2007 |
Kim B, Candler RN, Hopcroft MA, Agarwal M, Park WT, Kenny TW. Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators Sensors and Actuators, a: Physical. 136: 125-131. DOI: 10.1016/J.Sna.2006.10.040 |
0.848 |
|
2007 |
Agarwal M, Mehta H, Candler RN, Chandorkar SA, Kim B, Hopcroft MA, Melamud R, Bahl G, Yama G, Kenny TW, Murmann B. Impact of miniaturization on the current handling of electrostatic MEMS resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 783-786. |
0.821 |
|
2007 |
Chandorkar SA, Mehta H, Agarwal M, Hopcroft MA, Jha CM, Candler RN, Yama G, Bahl G, Kim B, Melamud R, Goodson KE, Kenny TW. Non-isothermal micromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 211-214. |
0.814 |
|
2007 |
Melamud R, Kim B, Hopcroft MA, Chandorkar S, Agarwal M, Jha CM, Kenny TW. Composite flexural-mode resonator with controllable turnover temperature Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 199-202. |
0.843 |
|
2006 |
Jha CM, Hopcroft MA, Agarwal M, Chandorkar SA, Candler RN, Subramanian V, Melamud R, Bhat S, Kim B, Park KK, Kenny TW. In-chip device-layer thermal isolation of MEMS resonator for lower power budget American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) Mems. DOI: 10.1115/IMECE2006-15176 |
0.82 |
|
2006 |
Agarwal M, Dutton DT, Theil JA, Bai Q, Par E, Hoen S. Characterization of a dipole surface drive actuator with large travel and force Journal of Microelectromechanical Systems. 15: 1726-1734. DOI: 10.1109/Jmems.2006.883886 |
0.314 |
|
2006 |
Candler RN, Hopcroft MA, Kim B, Park WT, Melamud R, Agarwal M, Yama G, Partridge A, Lutz M, Kenny TW. Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators Journal of Microelectromechanical Systems. 15: 1446-1456. DOI: 10.1109/Jmems.2006.883586 |
0.789 |
|
2006 |
Agarwal M, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Kenny TW, Murmann B. Optimal drive condition for nonlinearity reduction in electrostatic microresonators Applied Physics Letters. 89. DOI: 10.1063/1.2388886 |
0.794 |
|
2006 |
Hopcroft MA, Agarwal M, Park KK, Kim B, Jha CM, Candler RN, Yama G, Murmann B, Kenny TW. Temperature compensation of a MEMS resonator using quality factor as a thermometer Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 222-225. |
0.84 |
|
2006 |
Agarwal M, Park KK, Hopcroft M, Chandorkar S, Candler RN, Kim B, Melamud R, Yama G, Murmann B, Kenny TW. Effects of mechanical vibrations and bias voltage noise on phase noise of MEMS resonator based oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 154-157. |
0.811 |
|
2005 |
Agarwal M, Park K, Candler R, Hopcroft M, Jha C, Melamud R, Kim B, Murmann B, Kenny TW. Non-linearity cancellation in MEMS resonators for improved power-handling Technical Digest - International Electron Devices Meeting, Iedm. 2005: 286-289. |
0.816 |
|
2005 |
Kim B, Candler RN, Hopcroft M, Agarwal M, Park WT, Kenny TW. Frequency stability of wafer-scale encapsulated MEMS resonators Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 1965-1968. |
0.848 |
|
2004 |
Kim B, Candler RN, Hopcroft M, Agarwal M, Park WT, Li JT, Kenny T. Investigation of MEMS resonator characteristics during long-term and wide temperature variation operation American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) Mems. 413-416. DOI: 10.1115/IMECE2004-61727 |
0.852 |
|
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