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Alireza Modafe, Ph.D. - Publications

Affiliations: 
2007 Electrical Engineering University of Maryland, College Park, College Park, MD 
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18 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2008 Ghalichechian N, Modafe A, Beyaz MI, Ghodssi R. Design, fabrication, and characterization of a rotary micromotor supported on microball bearings Journal of Microelectromechanical Systems. 17: 632-642. DOI: 10.1109/Jmems.2008.916346  0.759
2007 Ghalichechian N, Modafe A, Beyaz MI, Ghodssi R. A rotary micromotor supported on microball bearings Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 1123-1126. DOI: 10.1109/SENSOR.2007.4300332  0.758
2007 Moghaddam S, Kiger KT, Modafe A, Ghodssi R. A novel benzocyclobutene-based device for studying the dynamics of heat transfer during the nucleation process Journal of Microelectromechanical Systems. 16: 1355-1366. DOI: 10.1109/Jmems.2007.907781  0.563
2007 Ghalichechian N, Modafe A, Lang JH, Ghodssi R. Dynamic characterization of a linear electrostatic micromotor supported on microball bearings Sensors and Actuators, a: Physical. 136: 496-503. DOI: 10.1016/J.Sna.2006.08.019  0.743
2006 Tan X, Modafe A, Ghodssi R. Measurement and modeling of dynamic rolling friction in linear microball bearings Journal of Dynamic Systems, Measurement and Control, Transactions of the Asme. 128: 891-898. DOI: 10.1115/1.2362786  0.574
2006 Modafe A, Ghalichechian N, Frey A, Lang JH, Ghodssi R. Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion Journal of Micromechanics and Microengineering. 16: S182-S190. DOI: 10.1088/0960-1317/16/9/S03  0.778
2005 Modafe A, Ghalichechian N, Frey A, Lang JH, Ghodssi R. A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 1: 693-696. DOI: 10.1109/SENSOR.2005.1496511  0.758
2005 Modafe A, Ghalichechian N, Powers M, Khbeis M, Ghodssi R. Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS Microelectronic Engineering. 82: 154-167. DOI: 10.1016/J.Mee.2005.07.005  0.652
2005 Modafe A, Ghalichechian N, Ghodssi R. Multilevel interconnection and isolation for electrostatic MEMS using embedded benzocyclobutene in silicon process 2005 Proceedings - 22nd International Vlsi Multilevel Interconnection Conference, Vmic 2005. 309-316.  0.756
2005 Tan X, Modafe A, Ghodssi R. Modeling of velocity-dependent rolling friction in linear microball bearings Proceedings of the World Tribology Congress Iii - 2005. 157-158.  0.502
2005 Tan X, Modafe A, Ghodssi R. An empirical model for dynamic friction in microfabricated linear microball bearings Proceedings of the American Control Conference. 4: 2463-2468.  0.516
2004 Ghalichechian N, Modafe A, Ghodssi R, Lazzeri P, Micheli V, Anderle M. Integration of benzocyclobutene polymers and silicon micromachined structures using anisotropic wet etching Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 2439-2447. DOI: 10.1116/1.1787519  0.763
2004 Lin TW, Modafe A, Shapiro B, Ghodssi R. Characterization of dynamic friction in MEMS-based microball bearings Ieee Transactions On Instrumentation and Measurement. 53: 839-846. DOI: 10.1109/Tim.2004.827089  0.554
2004 Modafe A, Ghalichechian N, Kleber B, Ghodssi R. Electrical characterization of benzocyclobutene polymers for electric micromachines Ieee Transactions On Device and Materials Reliability. 4: 495-508. DOI: 10.1109/Tdmr.2004.830289  0.721
2004 Tan X, Modafe A, Hergert R, Ghalichechian N, Shapiro B, Baras JS, Ghodssi R. Vision-based microtribological characterization of linear microball bearings Proceedings of the Asme/Stle International Joint Tribology Conference, Ijtc 2004. 23-28.  0.723
2003 Modafe A, Ghalichechian N, Kleber B, Ghodssi R. Electrical Characterization of BCB for Electrostatic Microelectromechanical Devices Mrs Proceedings. 782. DOI: 10.1557/Proc-782-A5.69  0.72
2003 Waits CM, Modafe A, Ghodssi R. Investigation of gray-scale technology for large area 3D silicon MEMS structures Journal of Micromechanics and Microengineering. 13: 170-177. DOI: 10.1088/0960-1317/13/2/302  0.714
2003 Modafe A, Ghalichechian N, Kleber B, Ghodssi R. Electrical characterization of BCB for electrostatic microelectromechanical devices Materials Research Society Symposium - Proceedings. 782: 305-310.  0.663
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