Year |
Citation |
Score |
2011 |
Neureuther AR, Rubinstein J, Miller M, Yamazoe K, Chin E, Levy C, Wang L, Xu N, Spanos C, Qian K, Poolla K, Ghan J, Subramanian A, Liu TJK, Sun X, et al. Collaborative research on emerging technologies and design Proceedings of Spie - the International Society For Optical Engineering. 8081. DOI: 10.1117/12.899394 |
0.507 |
|
2011 |
Bubke K, Ruhm M, Aldana R, Niehoff M, Xie X, Ghan J, Adrichem Van P, Bald H, Luehrmann P, Roling S, Seltmann R. Simulation-based scanner tuning using FlexRay capability and scatterometry Proceedings of Spie - the International Society For Optical Engineering. 7973. DOI: 10.1117/12.890501 |
0.318 |
|
2011 |
Bekaert J, Van Look L, D'Havé K, Laenens B, Vandenberghe G, Van Adrichem P, Shao W, Ghan J, Schreel K, Neumann JT. Scanner matching for standard and freeform illumination shapes using FlexRay Proceedings of Spie - the International Society For Optical Engineering. 7973. DOI: 10.1117/12.881607 |
0.314 |
|
2009 |
Ghan J, Ma N, Mishra S, Spanos C, Poolla K, Rodriguez N, Capodieci L. Clustering and pattern matching for an automatic hotspot classification and detection system Proceedings of Spie - the International Society For Optical Engineering. 7275. DOI: 10.1117/12.814328 |
0.56 |
|
2009 |
Ghan J, Sezginer A. Algorithm for determining printability and colouring of a target layout for double patterning Proceedings of Spie - the International Society For Optical Engineering. 7275. DOI: 10.1117/12.814321 |
0.372 |
|
2008 |
Ma N, Ghan J, Mishra S, Spanos C, Poolla K, Rodriguez N, Capodieci L. Automatic hotspot classification using pattern-based clustering Proceedings of Spie - the International Society For Optical Engineering. 6925. DOI: 10.1117/12.772867 |
0.563 |
|
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