Year |
Citation |
Score |
2007 |
Thompson KC, Srivastava SN, Antonsen EL, Ruzic DN. Debris mitigation techniques for a Sn- and Xe-fueled EUV light source Proceedings of Spie - the International Society For Optical Engineering. 6517. DOI: 10.1117/12.712472 |
0.381 |
|
2007 |
Alman DA, Huatan Q, Spila T, Thompson KC, Antonsen EL, Jurczyk BE, Ruzic DN. Characterization of collector optic material samples exposed to a discharge-produced plasma extreme ultraviolet light source Journal of Micro/Nanolithography, Mems, and Moems. 6. DOI: 10.1117/1.2437212 |
0.363 |
|
2007 |
Ruzic DN, Thompson KC, Jurczyk BE, Antonsen EL, Srivastava SN, Spencer JB. Reduction of ion energies from a multicomponent Z-pinch plasma Ieee Transactions On Plasma Science. 35: 606-613. DOI: 10.1109/Tps.2007.896983 |
0.339 |
|
2007 |
Srivastava SN, Thompson KC, Antonsen EL, Qiu H, Spencer JB, Papke D, Ruzic DN. Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources Journal of Applied Physics. 102. DOI: 10.1063/1.2756525 |
0.361 |
|
2006 |
Keidar M, Boyd LD, Antonsen EL, Burton RL, Spanjers GG. Optimization issues for a micropulsed plasma thruster Journal of Propulsion and Power. 22: 48-55. DOI: 10.2514/1.13954 |
0.571 |
|
2006 |
Qiu H, Thompson KC, Srivastava SN, Antonsen EL, Alman DA, Jurczyk BE, Ruzic DN. Optical exposure characterization and comparisons for discharge produced plasma Sn extreme ultraviolet system Journal of Microlithography, Microfabrication and Microsystems. 5. DOI: 10.1117/1.2358124 |
0.382 |
|
2006 |
Qiu H, Alman DA, Thompson KC, Spencer JB, Antonsen EL, Jurczyk BE, Ruzic DN, Spila TP. Characterization of collector optic material samples before and after exposure in laser produced plasma and discharge produced plasma extreme ultraviolet sources Journal of Microlithography, Microfabrication and Microsystems. 5. DOI: 10.1117/1.2243082 |
0.397 |
|
2006 |
Jaworski MA, Jurczyk BE, Antonsen EL, Ruzic DN. Direct current magnetic insulation of an immersed RF antenna Plasma Sources Science and Technology. 15: 474-478. DOI: 10.1088/0963-0252/15/3/024 |
0.314 |
|
2006 |
Antonsen EL, Burton RL, Reed GA, Spanjers GG. Fast surface temperature measurement of Teflon propellant-in-pulsed ablative discharges using HgCdTe photovoltaic cells Review of Scientific Instruments. 77. DOI: 10.1063/1.2360781 |
0.611 |
|
2006 |
Antonsen EL, Thompson KC, Hendricks MR, Alman DA, Jurczyk BE, Ruzic DN. Ion debris characterization from a z-pinch extreme ultraviolet light source Journal of Applied Physics. 99. DOI: 10.1063/1.2175471 |
0.348 |
|
2006 |
Thompson KC, Antonsen EL, Hendricks MR, Jurczyk BE, Williams M, Ruzic DN. Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography Microelectronic Engineering. 83: 476-484. DOI: 10.1016/J.Mee.2005.11.012 |
0.392 |
|
2005 |
Antonsen EL, Burton RL, Reed GA, Spanjers GG. Effects of Postpulse Surface Temperature on Micropulsed Plasma Thruster Operation Journal of Propulsion and Power. 21: 877-883. DOI: 10.2514/1.13032 |
0.602 |
|
2004 |
Keidar M, Boyd ID, Antonsen E, Spanjers GG. Electromagnetic Effects in the Near Field Plume Exhaust of a Micro-Pulsed-Plasma Thruster Journal of Propulsion and Power. 20: 961-969. DOI: 10.2514/1.8985 |
0.404 |
|
2004 |
Keidar M, Boyd ID, Antonsen EL, Gulczinski FS, Spanjers GG. Propellant Charring in Pulsed Plasma Thrusters Journal of Propulsion and Power. 20: 978-984. DOI: 10.2514/1.2471 |
0.388 |
|
2003 |
Antonsen EL, Burton RL, Spanjers GG, Engelman SF. Herriott cell interferometry for millimeter-scale plasma measurements Review of Scientific Instruments. 74: 1609-1612. DOI: 10.1063/1.1527257 |
0.587 |
|
2003 |
Antonsen EL, Burton RL, Spanjers GG, Engelman SF. Herriott Cell augmentation of a quadrature heterodyne interferometer Review of Scientific Instruments. 74: 88-93. DOI: 10.1063/1.1525873 |
0.559 |
|
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