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Lei Shan, Ph.D. - Publications

Affiliations: 
2000 Georgia Institute of Technology, Atlanta, GA 
Area:
Chemical Engineering, Mechanical Engineering, Materials Science Engineering
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7 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2002 Zhou C, Shan L, Hight JR, Danyluk S, Ng SH, Paszkowski AJ. Influence of Colloidal Abrasive Size on Material Removal Rate and Surface Finish in SiO2 Chemical Mechanical Polishing Tribology Transactions. 45: 232-238. DOI: 10.1080/10402000208982545  0.609
2002 Zhou C, Shan L, Hight JR, Ng SH, Danyluk S. Fluid pressure and its effects on chemical mechanical polishing Wear. 253: 430-437. DOI: 10.1016/S0043-1648(02)00155-2  0.657
2001 Zhou C, Shan L, Ng SH, Hight R, Paszkowski AJ, Danyluk S. Effects of Nano-scale Colloidal Abrasive Particle Size on SiO 2 by Chemical Mechanical Polishing Mrs Proceedings. 671. DOI: 10.1557/Proc-671-M1.6  0.605
2000 Zhou C, Shan L, Hight JR, Ng SH, Paszkowski AJ, Tichy J, Danyluk S. Interfacial Fluid Pressure and Its Effects on SiO 2 Chemical Mechanical Polishing Mrs Proceedings. 613. DOI: 10.1557/Proc-613-E7.1.1  0.651
2000 Shan L, Levert J, Meade L, Tichy J, Danyluk S. Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing Journal of Tribology-Transactions of the Asme. 122: 539-543. DOI: 10.1115/1.555398  0.626
1999 Shan L, Danyluk S, Levert J. Interfacial Pressure Measurements at Chemical Mechanical Polishing Interfaces Mrs Proceedings. 566: 187. DOI: 10.1557/Proc-566-187  0.597
1999 Tichy J, Levert JA, Shan L, Danyluk S. Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing Journal of the Electrochemical Society. 146: 1523-1528. DOI: 10.1149/1.1391798  0.599
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