Year |
Citation |
Score |
2019 |
Tang Y, Liu J, Yang Y, Hu S, Zhao L, Si X. Large range nano alignment for proximity lithography using complex grating Optics and Laser Technology. 112: 101-106. DOI: 10.1016/J.Optlastec.2018.10.049 |
0.344 |
|
2017 |
Zhou Y, Tang Y, Zhu J, Deng Q, Yang Y, Zhao L, Hu S. Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry. Applied Optics. 56: 2301-2306. PMID 28375269 DOI: 10.1364/Ao.56.002301 |
0.349 |
|
2017 |
Zhou Y, Tang Y, Deng Q, Zhao L, Hu S. Contrast enhancement of microsphere-assisted super-resolution imaging in dark-field microscopy Applied Physics Express. 10: 82501. DOI: 10.7567/Apex.10.082501 |
0.31 |
|
2017 |
Zhou Y, Tang Y, Deng Q, Liu J, Wang J, Zhao L. Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes Optics and Laser Technology. 93: 187-193. DOI: 10.1016/J.Optlastec.2017.03.005 |
0.361 |
|
2017 |
Cheng Y, Zhu J, He Y, Tang Y, Hu S, Zhao L. Quadratic grating apodized photon sieves for simultaneous multiplane microscopy Optics and Lasers in Engineering. 97: 78-85. DOI: 10.1016/J.Optlaseng.2017.05.002 |
0.329 |
|
2015 |
Zhu X, Hu S, Zhao L. Wafer focusing measurement of optical lithography system based on Hartmann–Shack wavefront testing Optics and Lasers in Engineering. 66: 128-131. DOI: 10.1016/J.Optlaseng.2014.09.001 |
0.344 |
|
2014 |
Zhu X, Hu S, Zhao L. Focal length measurement of a microlens-array by grating shearing interferometry. Applied Optics. 53: 6663-9. PMID 25322367 DOI: 10.1364/Ao.53.006663 |
0.31 |
|
2014 |
He Y, Zhao L, Tang Y, Hu S. A hybrid doubled achromat based on a photon sieve Optik. 125: 958-961. DOI: 10.1016/J.Ijleo.2013.07.111 |
0.315 |
|
2013 |
Zhu J, Hu S, Yu J, Zhou S, Tang Y, Zhong M, Zhao L, Chen M, Li L, He Y, Jiang W. Four-quadrant gratings moiré fringe alignment measurement in proximity lithography. Optics Express. 21: 3463-73. PMID 23481804 DOI: 10.1364/Oe.21.003463 |
0.371 |
|
2010 |
Zhou S, Yang Y, Zhao L, Hu S. Tilt-modulated spatial phase imaging method for wafer-mask leveling in proximity lithography. Optics Letters. 35: 3132-4. PMID 20847802 DOI: 10.1364/Ol.35.003132 |
0.365 |
|
2010 |
Jiang W, Hu S, Zhao L, Yan W, Yang Y. Design and application of phase photon sieve Optik. 121: 637-640. DOI: 10.1016/J.Ijleo.2008.10.007 |
0.329 |
|
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