Year |
Citation |
Score |
2020 |
Hamdan A, Gorry J, Merciris T, Margot J. Electrical characterization of positive and negative pulsed nanosecond discharges in water coupled with time-resolved light detection Journal of Applied Physics. 128: 33304. DOI: 10.1063/5.0010387 |
0.324 |
|
2020 |
Hajlaoui T, Émond N, Quirouette C, Drogoff BL, Margot J, Chaker M. Metal–insulator transition temperature of boron-doped VO2 thin films grown by reactive pulsed laser deposition Scripta Materialia. 177: 32-37. DOI: 10.1016/J.Scriptamat.2019.09.019 |
0.37 |
|
2019 |
Rojo M, Glad X, Briancon JL, Margot J, Dap S, Clergereaux R. Transport of Dust Particles in Very Low-Pressure Magnetized Plasma Studied by Rapid Imaging Ieee Transactions On Plasma Science. 47: 3281-3288. DOI: 10.1109/Tps.2019.2920311 |
0.35 |
|
2019 |
Rojo M, Glad X, Margot J, Dap S, Clergereaux R. Charging and heating processes of dust particles in an electron cyclotron resonance plasma Plasma Sources Science and Technology. 28: 85004. DOI: 10.1088/1361-6595/Ab1Cac |
0.313 |
|
2019 |
Boisvert J, Montpetit F, Vidal F, Margot J, Stafford L. Time and space-resolved experimental investigation of the electron energy distribution function of a helium capacitive discharge at atmospheric pressure Journal of Physics D. 52: 245202. DOI: 10.1088/1361-6463/Ab0Fd4 |
0.349 |
|
2018 |
Boisvert JS, Stafford L, Naudé N, Margot J, Massines F. Electron density and temperature in an atmospheric-pressure helium diffuse dielectric barrier discharge from kHz to MHz Plasma Sources Science and Technology. 27: 35005. DOI: 10.1088/1361-6595/Aab025 |
0.357 |
|
2018 |
Boisvert J-, Vidal F, Margot J. Generation of a long uniform low-temperature RF discharge in helium up to atmospheric pressure Physics of Plasmas. 25: 83514. DOI: 10.1063/1.5025430 |
0.356 |
|
2017 |
Claustre J, Boukandou-Mombo C, Margot J, Matte J, Vidal F. An advanced time-dependent collisional-radiative model of helium plasma discharges Plasma Sources Science and Technology. 26: 105005. DOI: 10.1088/1361-6595/Aa8A16 |
0.402 |
|
2017 |
Makdessi GA, Hamdan A, Margot J, Clergereaux R. Characterization by laser-induced photodetachment of anions formed during dust particle growth in a magnetically confined very low-pressure argon–acetylene plasma Plasma Sources Science and Technology. 26: 85001. DOI: 10.1088/1361-6595/Aa7806 |
0.418 |
|
2017 |
Boisvert JS, Margot J, Massines F. Transitions of an atmospheric-pressure diffuse dielectric barrier discharge in helium for frequencies increasing from kHz to MHz Plasma Sources Science and Technology. 26: 35004. DOI: 10.1088/1361-6595/Aa56A5 |
0.315 |
|
2017 |
Makdessi GA, Glad X, Dap S, Rojo M, Clergereaux R, Margot J. Influence of a magnetic field on the formation of carbon dust particles in very low-pressure high-density plasmas Journal of Physics D. 50: 155203. DOI: 10.1088/1361-6463/50/15/155203 |
0.311 |
|
2017 |
Boisvert J-, Sadeghi N, Margot J, Massines F. Influence of the excitation frequency on the density of helium metastable atoms in an atmospheric pressure dielectric barrier discharge Journal of Applied Physics. 121: 43302. DOI: 10.1063/1.4974301 |
0.362 |
|
2017 |
Boisvert J, Margot J, Massines F. Discharge physics and influence of the modulation on helium DBD modes in the medium-frequency range at atmospheric pressure European Physical Journal-Applied Physics. 77: 30801. DOI: 10.1051/Epjap/2017160480 |
0.36 |
|
2017 |
Brunet P, Rincón R, Margot J, Massines F, Chaker M. Deposition of homogeneous carbon-TiO2 composites by atmospheric pressure DBD Plasma Processes and Polymers. 14: 1600075. DOI: 10.1002/Ppap.201600075 |
0.322 |
|
2016 |
Vigne S, Hossain N, Fesharaki F, Kabir SM, Margot J, Wu K, Chaker M. Optical properties of epitaxial CaxBa1-xNb2O6 thin film based rib-waveguide structure on (001) MgO for electro-optic applications. Optics Express. 24: 28573-28582. PMID 27958501 DOI: 10.1364/Oe.24.028573 |
0.344 |
|
2016 |
Delachat F, Le Drogoff B, Constancias C, Delprat S, Gautier E, Chaker M, Margot J. Fabrication of high aspect ratio tungsten nanostructures on ultrathin c-Si membranes for extreme UV applications. Nanotechnology. 27: 025304. PMID 26630379 DOI: 10.1088/0957-4484/27/2/025304 |
0.313 |
|
2016 |
Hamdan A, Valade F, Margot J, Vidal F, Matte J. Space and time structure of helium pulsed surface-wave discharges at intermediate pressures (5–50 Torr) Plasma Sources Science and Technology. 26: 15001. DOI: 10.1088/0963-0252/26/1/015001 |
0.393 |
|
2016 |
Makdessi GA, Margot J, Clergereaux R. Characterization of magnetically confined low-pressure plasmas produced by an electromagnetic field in argon-acetylene mixtures Plasma Sources Science and Technology. 25: 55007. DOI: 10.1088/0963-0252/25/5/055007 |
0.402 |
|
2016 |
Gangwar RK, Levasseur O, Naudé N, Gherardi N, Massines F, Margot J, Stafford L. Determination of the electron temperature in plane-to-plane He dielectric barrier discharges at atmospheric pressure Plasma Sources Science and Technology. 25: 15011. DOI: 10.1088/0963-0252/25/1/015011 |
0.369 |
|
2016 |
Boisvert JS, Margot J, Massines F. Transitions between various diffuse discharge modes in atmospheric-pressure helium in the medium-frequency range Journal of Physics D. 49: 325201. DOI: 10.1088/0022-3727/49/32/325201 |
0.342 |
|
2016 |
Hamdan A, Makdessi GA, Margot J. Synthesis of amorphous hydrogenated carbon thin films by magnetized radio-frequency discharge in argon-acetylene mixture at very low gas pressure Thin Solid Films. 599: 84-97. DOI: 10.1016/J.Tsf.2015.12.057 |
0.377 |
|
2015 |
Hamdan A, Margot J, Vidal F, Matte J. Characterization of helium surface-wave plasmas at intermediate pressures (5–50 Torr): temperatures and density of metastable atoms in the 23s level Journal of Physics D. 48: 35202. DOI: 10.1088/0022-3727/48/3/035202 |
0.42 |
|
2015 |
Dawood MS, Hamdan A, Margot J. Axial- and radial-resolved electron density and excitation temperature of aluminum plasma induced by nanosecond laser: Effect of the ambient gas composition and pressure Aip Advances. 5: 117136. DOI: 10.1063/1.4936251 |
0.461 |
|
2015 |
Dawood MS, Hamdan A, Margot J. Influence of surrounding gas, composition and pressure on plasma plume dynamics of nanosecond pulsed laser-induced aluminum plasmas Aip Advances. 5: 107143. DOI: 10.1063/1.4935100 |
0.44 |
|
2014 |
Fesharaki F, Hossain N, Vigne S, Margot J, Wu K, Chaker M. Theoretical Analysis and Experimental Evaluation of SiO 2 -CBN-MgO Rib Waveguide Structure Ieee Photonics Technology Letters. 26: 1821-1824. DOI: 10.1109/Lpt.2014.2336731 |
0.315 |
|
2014 |
Dawood MS, Margot J. Effect of ambient gas pressure and nature on the temporal evolution of aluminum laser-induced plasmas Aip Advances. 4: 37111. DOI: 10.1063/1.4869076 |
0.463 |
|
2013 |
Muñoz J, Margot J, Chaker M. Argon metastable and resonant densities in a low-pressure Ar–N2 inductively coupled plasma Journal of Physics D. 46: 455205. DOI: 10.1088/0022-3727/46/45/455205 |
0.378 |
|
2013 |
Vigne S, Delprat S, Chaker M, Margot J. Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas Journal of Applied Physics. 114: 103303. DOI: 10.1063/1.4820934 |
0.344 |
|
2013 |
Vigne S, Muníz J, Delprat S, Margot J, Chaker M. Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material Microelectronic Engineering. 110: 265-269. DOI: 10.1016/J.Mee.2013.01.052 |
0.426 |
|
2012 |
Boudreault O, Mattei S, Stafford L, Margot J, Moisan M, Khare R, Donnelly VM. Nonlocal effect of plasma resonances on the electron energy-distribution function in microwave plasma columns. Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics. 86: 015402. PMID 23005484 DOI: 10.1103/Physreve.86.015402 |
0.382 |
|
2012 |
Riabinina D, Chaker M, Margot J. Dependence of gold nanoparticle production on pulse duration by laser ablation in liquid media. Nanotechnology. 23: 135603. PMID 22421100 DOI: 10.1088/0957-4484/23/13/135603 |
0.339 |
|
2012 |
Torriss B, Chaker M, Margot J. Electrical and Fourier transform infrared properties of epitaxial SmNiO3 tensile strained thin film Applied Physics Letters. 101: 91908. DOI: 10.1063/1.4748982 |
0.305 |
|
2012 |
Muñoz J, Margot J, Calzada MD. Absorption spectroscopy measurements of argon metastable and resonant atom density in atmospheric pressure Ar-He surface-wave plasmas using a low pressure lamp Journal of Applied Physics. 111: 23303. DOI: 10.1063/1.3671408 |
0.405 |
|
2012 |
Muñoz J, Margot J, Benhacene-Boudam MK. Influence of nitrogen impurities on the population of plasma species in atmospheric-pressure helium microwave plasmas Spectrochimica Acta Part B: Atomic Spectroscopy. 68: 17-23. DOI: 10.1016/J.Sab.2012.01.007 |
0.431 |
|
2011 |
Poirier JS, Bérubé PM, Mũoz J, Margot J, Stafford L, Chaker M. On the validity of neutral gas temperature by N2 rovibrational spectroscopy in low-pressure inductively coupled plasmas Plasma Sources Science and Technology. 20. DOI: 10.1088/0963-0252/20/3/035016 |
0.332 |
|
2010 |
Muñoz J, Margot J, Calzada MD. Experimental study of a helium surface-wave discharge at atmospheric pressure Journal of Applied Physics. 107: 83304. DOI: 10.1063/1.3346122 |
0.433 |
|
2010 |
Saussac J, Margot J, Stafford L, Chaker M. Simulation of redeposition during platinum etching in argon plasmas Journal of Applied Physics. 107: 63306. DOI: 10.1063/1.3343346 |
0.386 |
|
2009 |
Saussac J, Margot J, Chaker M. Profile evolution simulator for sputtering and ion-enhanced chemical etching Journal of Vacuum Science and Technology. 27: 130-138. DOI: 10.1116/1.3054134 |
0.408 |
|
2009 |
Stafford L, Khare R, Guha J, Donnelly VM, Poirier JS, Margot J. Recombination of chlorine atoms on plasma-conditioned stainless steel surfaces in the presence of adsorbed Cl2 Journal of Physics D: Applied Physics. 42. DOI: 10.1088/0022-3727/42/5/055206 |
0.393 |
|
2009 |
Bérubé P-, Poirier J-, Margot J, Stafford L, Ndione PF, Chaker M, Morandotti R. Correlation between surface chemistry and ion energy dependence of the etch yield in multicomponent oxides etching Journal of Applied Physics. 106: 63302. DOI: 10.1063/1.3223350 |
0.415 |
|
2009 |
Stafford L, Khare R, Donnelly VM, Margot J, Moisan M. Electron energy distribution functions in low-pressure oxygen plasma columns sustained by propagating surface waves Applied Physics Letters. 94. DOI: 10.1063/1.3072364 |
0.349 |
|
2007 |
Stafford L, Langlois O, Margot J, Gaidi M, Chaker M. Influence of the positive ion composition on the ion-assisted chemical etch yield of SrTiO3 films in Ar∕SF6 plasmas Journal of Vacuum Science and Technology. 25: 425-431. DOI: 10.1116/1.2713410 |
0.364 |
|
2007 |
Stafford L, Margot J, Delprat S, Chaker M, Pearton SJ. Influence of redeposition on the plasma etching dynamics Journal of Applied Physics. 101: 83303. DOI: 10.1063/1.2719015 |
0.396 |
|
2006 |
Soltani M, Chaker M, Jiang XX, Nikanpour D, Margot J. Thermochromic La1−xSrxMnO3 (x=0.1, 0.175, and 0.3) smart coatings grown by reactive pulsed laser deposition Journal of Vacuum Science and Technology. 24: 1518-1523. DOI: 10.1116/1.2204923 |
0.344 |
|
2006 |
Stafford L, Pearton SJ, Margot J. Influence of ion mixing on the energy dependence of the ion-assisted chemical etch rate in reactive plasmas Journal of Applied Physics. 100: 063309. DOI: 10.1063/1.2349544 |
0.35 |
|
2005 |
Barthélemy O, Margot J, Laville S, Vidal F, Chaker M, Le Drogoff B, Johnston TW, Sabsabi M. Investigation of the state of local thermodynamic equilibrium of a laser-produced aluminum plasma. Applied Spectroscopy. 59: 529-36. PMID 15901339 DOI: 10.1366/0003702053641531 |
0.649 |
|
2005 |
Le Drogoff B, Vidal F, Laville S, Chaker M, Johnston T, Barthélemy O, Margot J, Sabsabi M. Laser-ablated volume and depth as a function of pulse duration in aluminum targets. Applied Optics. 44: 278-81. PMID 15678782 DOI: 10.1364/Ao.44.000278 |
0.599 |
|
2005 |
Soltani M, Stafford L, Chaker M, Margot J. Growth, Characterization and Processing of VO 2 Thin Films for Micro-switching Devices Mrs Proceedings. 872. DOI: 10.1557/Proc-872-J18.11 |
0.343 |
|
2005 |
Gaidi M, Stafford L, Amassian A, Chaker M, Margot J, Martinu L, Kulishov M. Influence of the Microstructure on the Optical Characteristics of SrTiO3 thin films Journal of Materials Research. 20: 68-74. DOI: 10.1557/Jmr.2005.0002 |
0.359 |
|
2005 |
Stafford L, Margot J. Comment on “Plasma etching of high dielectric constant materials on silicon in halogen plasma chemistries” by L. Sha and J. P. Chang [J. Vac. Sci. Technol. A 22, 88 (2004)] Journal of Vacuum Science and Technology. 23: 720-721. DOI: 10.1116/1.1938980 |
0.318 |
|
2005 |
Barthelemy O, Margot J, Chaker M. Characterization of the expansion of an aluminum laser-induced plasma in ambient air by fast photography Ieee Transactions On Plasma Science. 33: 476-477. DOI: 10.1109/Tps.2005.845011 |
0.415 |
|
2005 |
Langlois O, Stafford L, Margot J, Chaker M. Ion mass dependence of the etch yield of SrTiO3 films in reactive plasmas Applied Physics Letters. 87: 131503. DOI: 10.1063/1.2056611 |
0.352 |
|
2005 |
Stafford L, Margot J, Vidal F, Chaker M, Giroux K, Poirier J-, Quintal-Léonard A, Saussac J. Kinetics driving high-density chlorine plasmas Journal of Applied Physics. 98: 63301. DOI: 10.1063/1.2037873 |
0.375 |
|
2005 |
Stafford L, Margot J, Chaker M, Pearton SJ. Energy dependence of ion-assisted chemical etch rates in reactive plasmas Applied Physics Letters. 87: 71502. DOI: 10.1063/1.2031936 |
0.34 |
|
2005 |
Gaidi M, Stafford L, Margot J, Chaker M, Morandotti R, Kulishov M. Microfabricated SrTiO3 ridge waveguides Applied Physics Letters. 86: 221106. DOI: 10.1063/1.1942634 |
0.385 |
|
2005 |
Sáinz A, Margot J, García MC, Calzada MD. Role of dissociative recombination in the excitation kinetics of an argon microwave plasma at atmospheric pressure Journal of Applied Physics. 97: 113305. DOI: 10.1063/1.1922086 |
0.395 |
|
2005 |
Barthélemy O, Margot J, Chaker M, Sabsabi M, Vidal F, Johnston TW, Laville S, Drogoff BL. Influence of the laser parameters on the space and time characteristics of an aluminum laser-induced plasma Spectrochimica Acta Part B: Atomic Spectroscopy. 60: 905-914. DOI: 10.1016/J.Sab.2005.07.001 |
0.469 |
|
2004 |
Le Drogoff B, Chaker M, Margot J, Sabsabi M, Barthélemy O, Johnston TW, Laville S, Vidal F. Influence of the laser pulse duration on spectrochemical analysis of solids by laser-induced plasma spectroscopy. Applied Spectroscopy. 58: 122-9. PMID 14727729 DOI: 10.1366/000370204322729559 |
0.387 |
|
2004 |
Gaidi M, Stafford L, Chaker M, Margot J, Kulishov M. Growth and patterning of strontium-titanate-oxide thin films for optical devices applications Mrs Proceedings. 817. DOI: 10.1557/Proc-817-L6.16 |
0.345 |
|
2004 |
Drogoff BL, Margot J, Vidal F, Laville S, Chaker M, Sabsabi M, Johnston TW, Barthélemy O. Influence of the laser pulse duration on laser-produced plasma properties Plasma Sources Science and Technology. 13: 223-230. DOI: 10.1088/0963-0252/13/2/005 |
0.429 |
|
2004 |
Soltani M, Chaker M, Haddad E, Kruzelecky RV, Margot J. Effects of Ti–W codoping on the optical and electrical switching of vanadium dioxide thin films grown by a reactive pulsed laser deposition Applied Physics Letters. 85: 1958-1960. DOI: 10.1063/1.1788883 |
0.344 |
|
2004 |
Stafford L, Gaidi M, Chaker M, Langlois O, Margot J, Schiettekatte F, Wei P. Dependence of the sputter-etching characteristics of strontium-titanate-oxide thin films on their structural properties Applied Physics Letters. 84: 2500-2502. DOI: 10.1063/1.1702131 |
0.367 |
|
2004 |
Laville S, Vidal F, Johnston TW, Chaker M, Drogoff BL, Barthélemy O, Margot J, Sabsabi M. Modeling the time evolution of laser-induced plasmas for various pulse durations and fluences Physics of Plasmas. 11: 2182-2190. DOI: 10.1063/1.1691454 |
0.46 |
|
2003 |
Stafford L, Margot J, Langlois O, Chaker M. Barium–strontium–titanate etching characteristics in chlorinated discharges Journal of Vacuum Science and Technology. 21: 1247-1252. DOI: 10.1116/1.1577130 |
0.425 |
|
2003 |
Stafford L, Margot J, Chaker M, Pauna O. Characterization of neutral, positive, and negative species in a chlorine high-density surface-wave plasma Journal of Applied Physics. 93: 1907-1913. DOI: 10.1063/1.1538313 |
0.43 |
|
2002 |
Laville S, Vidal F, Johnston TW, Barthélemy O, Chaker M, Drogoff BL, Margot J, Sabsabi M. Fluid modeling of the laser ablation depth as a function of the pulse duration for conductors. Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics. 66: 066415. PMID 12513420 DOI: 10.1103/Physreve.66.066415 |
0.384 |
|
2002 |
Stafford L, Margot J, Delprat S, Chaker M, Queney D. Sputter-etching characteristics of barium–strontium–titanate and bismuth–strontium–tantalate using a surface-wave high-density plasma reactor Journal of Vacuum Science and Technology. 20: 530-535. DOI: 10.1116/1.1451275 |
0.472 |
|
2001 |
Vidal F, Johnston TW, Laville S, Barthélemy O, Chaker M, Le Drogoff B, Margot J, Sabsabi M. Critical-point phase separation in laser ablation of conductors. Physical Review Letters. 86: 2573-6. PMID 11289983 DOI: 10.1103/Physrevlett.86.2573 |
0.318 |
|
2001 |
Margot J, Vidal F, Chaker M, Johnston TW, Aliouchouche A, Tabbal M, Delprat S, Pauna O, Benhabib D. Sustaining power per electron for a large low-pressure argon magnetoplasma reactor: experiment and isothermal model results Plasma Sources Science and Technology. 10: 556-566. DOI: 10.1088/0963-0252/10/4/303 |
0.401 |
|
2001 |
Drogoff BL, Vidal F, Kaenel Yv, Chaker M, Johnston TW, Laville S, Sabsabi M, Margot J. Ablation of aluminum thin films by ultrashort laser pulses Journal of Applied Physics. 89: 8247-8252. DOI: 10.1063/1.1370361 |
0.426 |
|
2001 |
Delprat S, Chaker M, Margot J. Investigation of the gas pressure influence on patterned platinum etching characteristics using a high-density plasma Journal of Applied Physics. 89: 29-33. DOI: 10.1063/1.1330554 |
0.446 |
|
2001 |
Stafford L, Margot J, Johnston TW. Propagation of surface waves in two-plasma systems bounded by a metallic enclosure Journal of Plasma Physics. 66: 349-362. DOI: 10.1017/S0022377801001489 |
0.376 |
|
2001 |
Vidal F, Laville S, Johnston TW, Barthélemy O, Chaker M, Drogoff BL, Margot J, Sabsabi M. Numerical simulations of ultrashort laser pulse ablation and plasma expansion in ambient air Spectrochimica Acta Part B: Atomic Spectroscopy. 56: 973-986. DOI: 10.1016/S0584-8547(01)00195-1 |
0.442 |
|
2001 |
Drogoff BL, Margot J, Chaker M, Sabsabi M, Barthélemy O, Johnston TW, Laville S, Vidal F, Kaenel Yv. Temporal characterization of femtosecond laser pulses induced plasma for spectrochemical analysis of aluminum alloys Spectrochimica Acta Part B: Atomic Spectroscopy. 56: 987-1002. DOI: 10.1016/S0584-8547(01)00187-2 |
0.434 |
|
2000 |
St-Onge L, Chaker M, Margot J. Laser-induced photodetachment in high-density low-pressure SF6 magnetoplasmas Journal of Vacuum Science and Technology. 18: 2363-2371. DOI: 10.1116/1.1285935 |
0.424 |
|
2000 |
Petrov GM, Matte JP, Pérès I, Margot J, Sadi T, Hubert J, Tran KC, Alves LL, Loureiro J, Ferreira CM, Guerra V, Gousset G. Numerical Modeling of a He-N2 Capillary Surface Wave Discharge at Atmospheric Pressure Plasma Chemistry and Plasma Processing. 20: 183-207. DOI: 10.1023/A:1007065022725 |
0.395 |
|
1999 |
Delprat S, Chaker M, Margot J. Patterned Platinum Etching Studies in an Argon High-Density Plasma Japanese Journal of Applied Physics. 38: 4488-4491. DOI: 10.1143/Jjap.38.4488 |
0.43 |
|
1999 |
Pérès I, Alves LL, Margot J, Sadi T, Ferreira CM, Tran KC, Hubert J. Calculated Plasma Parameters And Excitation Spectra Of High-Pressure Helium Discharges Plasma Chemistry and Plasma Processing. 19: 467-486. DOI: 10.1023/A:1021878309471 |
0.401 |
|
1998 |
St-Onge L, Margot J, Chaker M. Experimental investigation of a large volume magnetoplasma source based on surface-wave propagation Plasma Sources Science and Technology. 7: 154-161. DOI: 10.1088/0963-0252/7/2/010 |
0.399 |
|
1998 |
St-Onge L, Margot J, Chaker M. Characterization of the negative ion fraction in high-density SF6 magnetoplasmas using ion acoustic waves Applied Physics Letters. 72: 290-292. DOI: 10.1063/1.120715 |
0.401 |
|
1997 |
Pérès I, Dallaire A, Jones P, Margot J. Dependence Of The Emission Characteristics Of Magnetized Surface-Wave Plasmas On The Azimuthal Configuration Of The Wave Field Journal of Applied Physics. 82: 4211-4218. DOI: 10.1063/1.366224 |
0.373 |
|
1997 |
Margot J, Chaker M, St-Onge L, Tabbal M, Aliouchouche A, Pauna O, Alinot C, Kliagine C. High-Frequency Magnetoplasmas in Electronegative Gases Journal De Physique Iv. 7. DOI: 10.1051/Jp4:1997424 |
0.433 |
|
1996 |
Hubert J, Bordeleau S, Tran KC, Michaud S, Milette B, Sing R, Jalbert J, Boudreau D, Moisan M, Margot J. Atomic spectroscopy with surface wave plasmas. Analytical and Bioanalytical Chemistry. 355: 494-500. PMID 15045307 DOI: 10.1007/S0021663550494 |
0.384 |
|
1996 |
Gat E, Bounasri F, Chaker M, Ravet MF, Moisan M, Margot J. Temperature effects on tungsten etching Microelectronic Engineering. 30: 337-340. DOI: 10.1016/0167-9317(95)00258-8 |
0.371 |
|
1995 |
Bounasri F, Gat E, Chaker M, Moisan M, Margot J, Ravet MF. Highly anisotropic etching of submicrometer features on tungsten Journal of Applied Physics. 78: 6780-6783. DOI: 10.1063/1.360503 |
0.345 |
|
1995 |
St‐Onge L, Sadeghi N, Booth JP, Margot J, Barbeau C. On the formation and loss of S2 molecules in a reactive ion etching reactor operating with SF6 Journal of Applied Physics. 78: 6957-6966. DOI: 10.1063/1.360463 |
0.375 |
|
1995 |
Bounasri F, Moisan M, St‐Onge L, Margot J, Chaker M, Pelletier J, Khakani MAE, Gat E. Etching Characteristics Of Thin Films Of Tungsten, Amorphous Silicon Carbide, And Sal-603 Resist Submitted To A Surface-Wave Driven Sf6 Magnetoplasma Near Electron Cyclotron Resonance Conditions Journal of Applied Physics. 77: 4030-4038. DOI: 10.1063/1.359484 |
0.378 |
|
1993 |
Giapis KP, Sadeghi N, Margot J, Gottscho RA, Lee TCJ. Limits to ion energy control in high density glow discharges: Measurement of absolute metastable ion concentrations Journal of Applied Physics. 73: 7188-7194. DOI: 10.1063/1.352391 |
0.435 |
|
1993 |
Margot J, Moisan M. Characteristics of surface-wave propagation in dissipative cylindrical plasma columns Journal of Plasma Physics. 49: 357-374. DOI: 10.1017/S0022377800017062 |
0.301 |
|
1993 |
Besner A, Margot J, Bordeleau S, Hubert J. Spatially resolved distribution of excited species in an argon surface-wave produced plasma at intermediate pressures (10-600 torr) obtained by tomography Spectrochimica Acta Part B: Atomic Spectroscopy. 48: 985-1001. DOI: 10.1016/S0584-8547(05)80004-7 |
0.39 |
|
1992 |
Zakrzewski Z, Moisan M, Margot J, Sauve G. Spatial distributions of electron density and electric field in discharges sustained within microwave circuits Plasma Sources Science and Technology. 1: 28-35. DOI: 10.1088/0963-0252/1/1/005 |
0.343 |
|
1991 |
Margot J, Moisan M, Ricard A. Optical Radiation Efficiency of Surface-Wave-Produced Plasmas as Compared to DC Positive Columns Applied Spectroscopy. 45: 260-271. DOI: 10.1366/0003702914337443 |
0.394 |
|
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