Daniel P. Sanders, Ph.D.

Affiliations: 
2005 California Institute of Technology, Pasadena, CA 
Area:
Organic chemistry
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Robert Howard Grubbs grad student 2005 Caltech
 (Development of fluorinated monomers and polymers for advanced photolithographic applications.)
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Publications

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Kim JY, Liu P, Maher MJ, et al. (2020) Spatial Control of Self-Assembled Block Copolymer Domain Orientation and Alignment on Photo-Patterned Surfaces. Acs Applied Materials & Interfaces
Lai K, Liu C, Tsai H, et al. (2017) Design technology co-optimization assessment for directed self-assembly-based lithography: design for directed self-assembly or directed self-assembly for design? Journal of Micro/Nanolithography, Mems, and Moems. 16: 013502
Vora A, Schmidt K, Alva G, et al. (2016) Orientation Control of Block Copolymers using Surface Active, Phase-preferential Additives. Acs Applied Materials & Interfaces
Xie T, Vora A, Mulcahey PJ, et al. (2016) Surface Assembly Configurations and Packing Preferences of Fibrinogen Mediated by the Periodicity and Alignment Control of Block Copolymer Nanodomains. Acs Nano
Nowak D, Morrison W, Wickramasinghe HK, et al. (2016) Nanoscale chemical imaging by photoinduced force microscopy. Science Advances. 2: e1501571
Vora A, Alva G, Chunder A, et al. (2016) Synthesis and Thin-film Self-assembly of Cylinder-Forming High-χ Block Copolymers Journal of Photopolymer Science and Technology. 29: 685-688
Liu C, Franke E, Lie FL, et al. (2016) Directed self-assembly patterning for forming fin field effect transistors Spie Newsroom
Chi C, Liu CC, Meli L, et al. (2016) DSA via hole shrink for advanced node applications Proceedings of Spie - the International Society For Optical Engineering. 9777
Liu CCC, Franke E, Lie FL, et al. (2016) DSA patterning options for FinFET formation at 7nm node Proceedings of Spie - the International Society For Optical Engineering. 9777
Tsai H, Miyazoe H, Vora A, et al. (2016) High chi block copolymer DSA to improve pattern quality for FinFET device fabrication Proceedings of Spie - the International Society For Optical Engineering. 9779
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