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Alain C. Diebold

Affiliations: 
Nanoscale Science and Engineering-Nanoscale Science State University of New York, Albany, Albany, NY, United States 
Area:
Nanoscience, General Physics, Materials Science Engineering
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"Alain Diebold"
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Ming Di grad student 2010 SUNY Albany
Vimal K. Kamineni grad student 2011 SUNY Albany
Lay W. Kong grad student 2011 SUNY Albany
Florence Nelson grad student 2012 SUNY Albany
Gangadhara R. Muthinti grad student 2013 SUNY Albany
Manasa Medikonda grad student 2014 SUNY Albany

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Publications

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Korde M, Kal S, Alix C, et al. (2020) Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry Journal of Vacuum Science & Technology B. 38: 024007
Mukundan V, Beckmann K, Tapily K, et al. (2019) Structural Correlation of Ferroelectric Behavior in Mixed Hafnia-Zirconia High-k Dielectrics for FeRAM and NCFET Applications Mrs Advances. 4: 545-551
Walsh LA, Green AJ, Addou R, et al. (2018) Fermi Level Manipulation Through Native Doping in the Topological Insulator BiSe. Acs Nano
Diebold AC, Antonelli A, Keller N. (2018) Perspective: Optical measurement of feature dimensions and shapes by scatterometry Apl Materials. 6: 058201
Dey S, Yu K, Consiglio S, et al. (2017) Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 35: 03E109
Yang F, Sendova M, Jacobs-Gedrim RB, et al. (2017) Rapid optical determination of topological insulator nanoplate thickness and oxidation Aip Advances. 7: 015114
Funke S, Wurstbauer U, Miller B, et al. (2017) Spectroscopic imaging ellipsometry for automated search of flakes of mono- and n-layers of 2D-materials Applied Surface Science. 421: 435-439
Dey S, Tapily K, Consiglio S, et al. (2016) Higher-k Tetragonal Phase Stabilization in Atomic Layer Deposited Hf1-xZrxO2 (0Mrs Advances. 1: 269-274
Consiglio S, Dey S, Yu K, et al. (2016) In Situ Ramp Anneal X-ray Diffraction Study of Atomic Layer Deposited Ultrathin TaN and Ta1-xAlxNyFilms for Cu Diffusion Barrier Applications Ecs Journal of Solid State Science and Technology. 5: P509-P513
Dixit D, Green A, Hosler ER, et al. (2016) Optical critical dimension metrology for directed self-assembly assisted contact hole shrink Journal of Micro/ Nanolithography, Mems, and Moems. 15
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