Yonghua Liu, Ph.D.
Affiliations: | 2006 | University of Texas at Dallas, Richardson, TX, United States |
Area:
Electronics and Electrical EngineeringGoogle:
"Yonghua Liu"Parents
Sign in to add mentorLawrence J. Overzet | grad student | 2006 | UT Dallas | |
(Metalorganic chemical vapor deposition of aluminum from methylpyrrolidine alane complex.) |
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Publications
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Liu Y, Overzet L, Goeckner M. (2007) Effect of substrate on the nucleation and growth of aluminum films deposited from methylpyrrolidine alane Thin Solid Films. 515: 6730-6736 |
Liu Y, Overzet LJ, Goeckner MJ. (2006) Chemical vapor deposition of aluminum from methylpyrrolidine alane complex Thin Solid Films. 510: 48-54 |
Zhou B, Joseph EA, Sant SP, et al. (2005) Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference reactor Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 23: 1657-1667 |