Year |
Citation |
Score |
2001 |
Michalicek MA, Bright VM. Development of advanced micromirror arrays by flip-chip assembly Proceedings of Spie - the International Society For Optical Engineering. 4561: 102-113. DOI: 10.1117/12.443105 |
0.626 |
|
2001 |
Michalicek MA, Bright VM. Fabrication of five-level, ultra-planar micromirror arrays by flip-chip assembly Proceedings of Spie - the International Society For Optical Engineering. 4561: 293-304. DOI: 10.1117/12.443098 |
0.606 |
|
2001 |
Michalicek MA, Bright VM. Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism Proceedings of Spie - the International Society For Optical Engineering. 4561: 209-220. DOI: 10.1117/12.443088 |
0.668 |
|
2001 |
Michalicek MA, Bright VM. Flip-chip fabrication of advanced micromirror arrays Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 313-316. |
0.652 |
|
2001 |
Michalicek MA, Bright VM. Flip-chip fabrication of advanced MEMS using a novel latching off-chip hinge mechanism Asme International Mechanical Engineering Congress and Exposition, Proceedings. 2: 2631-2638. |
0.636 |
|
2001 |
Michalicek MA, Bright VM. Flip-chip fabrication of advanced MEMS using a novel latching off-chip hinge mechanism Asme International Mechanical Engineering Congress and Exposition, Proceedings. 2: 2631-2638. |
0.636 |
|
2001 |
Hoivik N, Michalicek MA, Lee YC, Gupta KC, Bright VM. Digitally controllable variable high-Q MEMS capacitor for RF applications Ieee Mtt-S International Microwave Symposium Digest. 1: 2115-2118. |
0.536 |
|
1999 |
Zhang W, Harsh KF, Michalicek MA, Bright VM, Lee YC. Flip-chip assembly for RF and optical MEMS American Society of Mechanical Engineers, Eep. 26. |
0.548 |
|
1999 |
Zhang W, Harsh KF, Michalicek MA, Bright VM, Lee YC. Flip-chip assembly for RF and optical MEMS American Society of Mechanical Engineers, Eep. 26. |
0.581 |
|
1998 |
Michalicek MA, Comtois JH, Schriner HK. Geometry versus optical performance of micromirrors and arrays Proceedings of Spie - the International Society For Optical Engineering. 3440: 140-147. DOI: 10.1117/12.326690 |
0.504 |
|
1998 |
Michalicek MA, Comtois JH, Schriner HK. Development of advanced second-generation micromirror devices fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process Proceedings of Spie - the International Society For Optical Engineering. 3292: 71-80. DOI: 10.1117/12.305509 |
0.49 |
|
1998 |
Cowan WD, Bright VM, Lee MK, Comtois JH, Michalicek MA. Design and testing of polysilicon surface-micromachined piston micromirror arrays Proceedings of Spie - the International Society For Optical Engineering. 3292: 60-70. DOI: 10.1117/12.305508 |
0.583 |
|
1998 |
Michalicek MA, Comtois JH, Schriner HK. Design and fabrication of optical MEMS using a four-level, planarized, surface-micromachined polycrystalline silicon process Proceedings of Spie - the International Society For Optical Engineering. 3276: 48-55. DOI: 10.1117/12.302408 |
0.516 |
|
1998 |
Comtois JH, Michalicek MA, Barron CC. Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon Sensors and Actuators, a: Physical. 70: 23-31. |
0.478 |
|
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